INTEGRATED CIRCUIT SWITCHES, DESIGN STRUCTURE AND METHODS OF FABRICATING THE SAME
摘要
<p>Integrated MEMS switches, design structures and methods of fabricating such switches are provided. The method includes forming at least one tab (32a) of sacrificial material (36) on a side of a switching device (34) which is embedded in the sacrificial material. The method further includes stripping the sacrificial material through at least one opening (40) formed on the at least one tab which is on the side of the switching device, and sealing the at least one opening with a capping material (42).</p>
申请公布号
WO2011028384(A1)
申请公布日期
2011.03.10
申请号
WO2010US45248
申请日期
2010.08.12
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;ANDERSON, FELIX, P.;MCDEVITT, THOMAS, L.;STAMPER, ANTHONY, K.
发明人
ANDERSON, FELIX, P.;MCDEVITT, THOMAS, L.;STAMPER, ANTHONY, K.