SEMICONDUCTOR CHIPS HAVING GUARD RINGS AND METHODS OF FABRICATING THE SAME

摘要

PURPOSE: A semiconductor chips and a manufacturing method thereof are provided to improve the reliability of an integrated circuit by preventing the generation of the crack within the insulation layers. CONSTITUTION: A semiconductor substrate(10) comprises a main chip area and a scribe lane area that surrounds the main chip area. An insulating layer(31) is arranged on the semiconductor substrate. A guard ring(34) is formed within the insulating layer within the scribe lane area. The guard ring surrounds at least a part of the main chip area.