ELECTROSTATIC CHUCK AND MANUFACTURING METHOD FOR THE SAME

摘要

PURPOSE: An electrostatic chuck and a manufacturing method thereof are provided to generate or release the electrostatic force rapidly by forming a plurality of electrode layers. CONSTITUTION: An electrostatic chuck(20) comprises a plurality of electrode portions(26A) and an electrode layer(26). The electrode layer is connected to the DC power source so that a plurality of electrode portions has the same polarity. A second insulation layer is made as one body on the upper of the electrode layer. A plurality of projections supports the substrate and fills the transmission gas for transmitting the heat between the substrate and the second insulation layer.