发明名称 METHOD FOR TREATING ELECTRODE PAD, AND METHOD FOR TESTING OPEN SHORT OF A SUBSTRATE WITH THE SAME
摘要 PURPOSE: An electrode pad processing method and an open short test method using the same are provided to complete the OS test efficiently by removing the electrode pad without the physical or chemical damage to the ceramic substrate. CONSTITUTION: A ceramic substrate is prepared(S110). Electrode pads are formed on the ceramic substrate with the conductive material including the carbon nanotube(S140). The electrode pads formed on the ceramic substrate are removed after the open short inspection of the ceramic substrate is performed.
申请公布号 KR20110025485(A) 申请公布日期 2011.03.10
申请号 KR20090083571 申请日期 2009.09.04
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 KIM, YONG SUK;OH, YOUNG SOO;KIM, HYOUNG HO;LEE, TAEK JUNG;YOO, WON HEE;CHANG, BYEUNG GYU
分类号 H01L21/66;G01R31/02 主分类号 H01L21/66
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