发明名称 PHOTONIC MICROELECTROMECHANICAL SYSTEMS AND STRUCTURES
摘要 FIELD: physics. ^ SUBSTANCE: optical device has a substrate having a metal, a passivating layer, a conducting layer, a dielectric layer, a first optical layer and a movable second optical layer. The passivating layer lies on the substrate and provides electrical insulation for protecting other structures lying on the substrate from shorting onto the substrate. The conducting layer lies on the passivating layer. The dielectric layer lies on the conducting layer. The first optical layer at least partially transparent to and at least partially reflects incident light. The movable second optical layer at least partially reflects incident light from the first optical layer and lies between the first optical layer and the dielectric layer. A first cavity is created between the second optical layer and the dielectric layer. A second cavity is created between the second optical layer and the first optical layer. The second optical layer moves between the first and second positions, thereby modulating the reflecting power of the device in response to voltage applied between the conducting layer and the second optical layer. ^ EFFECT: selective absorption and reflection of light owing to use of optical interference. ^ 31 cl, 65 dwg
申请公布号 RU2413963(C2) 申请公布日期 2011.03.10
申请号 RU20050129850 申请日期 2005.09.26
申请人 KVEHLKOMM MEMS TEKNOLODZHIZ, INK. 发明人 CHUJ KLEHRENS
分类号 B81B7/02;G02B26/02 主分类号 B81B7/02
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