| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of measuring a three-dimensional shape capable of correctly measuring a three-dimensional shape of an object, without being influenced by vibration even under a vibration environment. SOLUTION: A plurality of laser slit light beams 21a and 22a are simultaneously irradiated to an object W, and a first light cutting-plane line image S11, for representing light cutting-plane lines 21b and 22b formed on the surface of the object W, is acquired. A part of the laser slit light beam 21a of the plurality of laser slit light beams 21a and 22a is irradiated to the object W, and a second light cutting-plane line image S12 for representing the light cutting-plane line 21b formed on the surface of the object W is acquired. On the basis of the first light cutting-plane line image S11 and the second light cutting-plane line image S12, correspondence relation between the light cutting-plane lines 21b and 22b imaged in the first light cutting-plane line image S11 and the plurality of laser slit light beams 21a and 22a is obtained. COPYRIGHT: (C)2011,JPO&INPIT
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