METHOD FOR FORMING A METAL OXIDE THIN-FILM PATTERN AND PRODUCTION METHOD FOR AN LED ELEMENT USING NANOIMPRINTING

摘要

According to one embodiment of the present invention, a method for forming a metal oxide thin-film pattern using nanoimprinting comprises the steps of: coating a light-sensitive metal-organic precursor solution onto a substrate; compressing the light-sensitive metal-organic precursor coated layer by using a mould which has been patterned so as to have a concavo-convex structure; forming a cured metal oxide thin-film pattern by irradiating ultraviolet light onto the compressed light-sensitive metal-organic precursor coated layer; and removing the patterned mould from the metal oxide thin-film pattern.