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发明名称
Vorrichtung und Verfahren zum Vakuum-Ausdampfen
摘要
申请公布号
DE60143926(D1)
申请公布日期
2011.03.10
申请号
DE20016043926
申请日期
2001.06.19
申请人
KIDO, JUNJI;PANASONIC ELECTRIC WORKS CO. LTD.
发明人
TSUBAKI, KENJI;KIDO, JUNJI;KISHIGAMI, YASUHISA;KONDO, YUKIHIRO
分类号
C23C14/12;H05B33/10;C23C14/24;C23C14/54
主分类号
C23C14/12
代理机构
代理人
主权项
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