| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of heightening shock resistance by suppressing the maximum stress without concentrating a stress on an intersection angle, and without lowering sensor sensitivity. <P>SOLUTION: This acceleration sensor 100 includes: a frame section 111; a weight section 112; a beam section 113 for connecting the frame section 111 to the weight section 112; an acceleration detection section formed on the beam section 113; a fillet section 116 spread toward a connecting section between the beam section 113 and the weight section 112 or the frame section 111; and a stress relaxing section 117 formed circularly or elliptically under the connecting section 115, and having a depth in a separating direction from the connecting section 115. The stress relaxing section 117 is formed so as to satisfy following conditions: L≥100 μm, 30 μm≤W≤60 μm, and 10 μm≤O≤40 μm, where W is a beam width, L is an intersection width, and O is the depth. <P>COPYRIGHT: (C)2011,JPO&INPIT |
