摘要 |
PROBLEM TO BE SOLVED: To provide an installation method of an ultrasonic vibrator enabling use of the ultrasonic vibrator comprising a piezoelectric element to, for example, a specimen in a high temperature state. SOLUTION: This method for installing on the specimen 1, the ultrasonic vibrator 2 comprising the piezoelectric element formed by sandwiching a piezoelectric body 4 between a lower electrode 5 and an upper electrode 3 has a process wherein the lower electrode 5 of the ultrasonic vibrator 2 is faced to an ultrasonic vibrator installation surface 6 of the specimen 1, and ribs 7 for connecting the installation surface 6 to the lower electrode 5 is provided therebetween, at an interval in the face direction of the installation surface 6, and a filling agent is arranged between the ribs 7, and between the installation surface 6 and the lower electrode 5, in contact with the installation surface 6 and the lower electrode 5. COPYRIGHT: (C)2011,JPO&INPIT |