| 摘要 |
<p>A piezoelectric actuator drives and tilts, about an axis, an object to be driven. The piezoelectric actuator is provided with: a movable frame having an annular structure which surrounds in a planar manner the object to be driven, the annular structure surrounding the object by weight sections disposed on both sides of the axis and by connection sections extending so as to intersect the axis and connecting the weight sections to each other, the movable frame having the object to be driven connected thereto and connecting and supporting the object to be driven; and drive beams configured by forming piezoelectric thin films on elastic bodies, disposed on the outer sides of the movable frame, and connected so as to apply a tilting force about the axis to the connection sections of the movable frame.</p> |
