| 摘要 |
PROBLEM TO BE SOLVED: To three-dimensionally inspect a cutting plane of a glass substrate from a plurality of directions, and to rapidly, accurately, and optically detect the cutting plane information utilized for quality inspection of the glass substrate. SOLUTION: This cutting plane inspection device 100 includes a fixing plate 110 for fixing the glass substrate 1, first, second and third photographing means 120, 130 and 140 for acquiring upside, downside and plane profile videos of the cutting plane 1a of the glass substrate 1, and a main robot 150 to which the first to third photographing means 120, 130 and 140 are fixed and that has a frame 151 for moving them. The cutting plane inspection device 100 feeds back the cutting plane information acquired optically, and can improve the productivity and quality of the glass substrate 1. COPYRIGHT: (C)2011,JPO&INPIT
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