METHOD AND DEVICE FOR ESTIMATING ADHESIVE STRENGTH OF FINE STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a method and device for estimating adhesive strength capable of estimating accurately adhesive strength working on a contact point of a fine structure. SOLUTION: The estimation device 170 acquires a volume changing from the state where a contact part 114 has a contact with a contact point member 120 until the state where the contact part 114 is separated from the contact point member 120, and estimates adhesive strength based on the volume quantity. Hereby, since the adhesive strength can be estimated in the same state of the actual fine structure 1, the adhesive strength working on the contact point of the fine structure 1 can be estimated accurately as a result. COPYRIGHT: (C)2011,JPO&INPIT