GAS SUPPLY SYSTEM

摘要

A fluorine gas generation system is provided with fluorine gas supply systems and a control device. Each fluorine gas supply system includes a fluorine gas generation device. Each fluorine gas supply system is connected to a group of CVD devices. Each fluorine gas generation device includes a fluorine gas generation section and a buffer tank. An on/off valve is disposed in piping. The piping is branched at the other end thereof to lines of piping. Each lines of piping is connected to a CVD device. The lines of piping of adjacent fluorine gas supply systems are connected to each other by piping, and an on/off valve is disposed in the piping.