| 摘要 |
A method for detecting defects in an object includes a step of locally illuminating the object by radiating in light having a wavelength to which the object is transparent. Multiply reflected components of the incident light are detected while the detection of directly transmitted components of the incident light is at least partly avoided and the detection of singly reflected components of the incident light is at least partly avoided. Defects are identified by evaluating intensity differences in the detected components of the incident light. There is also disclosed a device for carrying out the method.
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