| 发明名称 |
Mirror device with an anti-stiction layer |
| 摘要 |
A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.
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| 申请公布号 |
US2011058247(A1) |
申请公布日期 |
2011.03.10 |
| 申请号 |
US20080151219 |
申请日期 |
2008.05.02 |
| 申请人 |
MAEDA YOSHIHIRO;ISHII FUSAO;WATANABE KAZUHIRO;ICHIKAWA HIROTOSHI |
发明人 |
MAEDA YOSHIHIRO;ISHII FUSAO;WATANABE KAZUHIRO;ICHIKAWA HIROTOSHI |
| 分类号 |
G02B26/02;H05K13/00 |
主分类号 |
G02B26/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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