METHOD FOR FORMING METAL OXIDE FILM, METAL OXIDE FILM AND APPARATUS FOR FORMING METAL OXIDE FILM

摘要

A method for forming a metal oxide film, which can further improve the production efficiency while maintaining low resistivity of a metal oxide film formed thereby.  The method for forming a metal oxide film comprises the following steps: a step wherein a solution (4) containing a metal element and ethylenediamine (4a) is formed into a mist; a step wherein a substrate (2) is heated; and a step wherein the mist of the solution (4) obtained in the above-mentioned step is supplied to a first major surface of the substrate (2) which has been heated in the above-mentioned heating step.