METHOD OF FORMING PATTERN

摘要

PURPOSE: A method for forming patterns is provided to protect a material forming the patterns from external effect using a substrate with nano scale concave-convex and a simple coating method. CONSTITUTION: A photosensitive material(12) is coated on the entire surface of a substrate(11) to form a photosensitive material layer through a spin coating method. A nano scale concave-convex is formed on a region of the photosensitive material layer on which a pattern is to be formed through one method selected from a group including a laser interference method, a photolithography method, and a nano imprint method. The region with the nano scale concave-convex is coated with a solution(21).