| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique capable of deriving an effective light source including a polarization direction at a reduced calculation cost. <P>SOLUTION: A determination method of determining, by a computer, an effective light source formed on the pupil plane of a projection optical system of an exposure device including a lighting optical system and the projection optical system includes: a step of dividing the effective light source into a plurality of regions; a step of selecting one of the plurality of regions; a first calculation step of calculating the electric field amplitude vector of an image formed at least at one evaluation point on the image plane of the projection optical system when assuming that light from the selected region is linear polarized light in a first direction and calculating the electric field amplitude vector of an image formed at least at the one evaluation point on the image plane of the projection optical system when assuming that the light from the selected region is linear polarized light in a second direction orthogonal to the first direction; and a first determination step of determining the polarization direction of the selected region using the electric field amplitude vector and the electric field amplitude vector. <P>COPYRIGHT: (C)2011,JPO&INPIT |
