| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately measure positional information for a mobile body by use of a plurality of head to drive (position control) the mobile body by calibrating mutual displacement between a plurality of reference coordinate systems. <P>SOLUTION: Within an area A0 where of four heads 60<SB>1</SB>-60<SB>4</SB>installed on a wafer stage WST1, heads included in the first head group and the second head group to which three heads each belong that include one head different from each other face the corresponding areas on a scale plate, the wafer stage WST1 is driven based on positional information which is obtained using the first head group, and displacement (displacement of position, rotation, and scaling) between corresponding first and second reference coordinate systems C1, C2 is determined using the positional information obtained using the first and second head groups. By using the results to correct measurement results obtained using the second head group, the displacement between the first and second reference coordinate systems C1, C2 is calibrated, whereby measurement errors that come with the displacement between areas on the scale plate the four heads 60<SB>1</SB>-60<SB>4</SB>face respectively are corrected. <P>COPYRIGHT: (C)2011,JPO&INPIT |
