| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an element having improved conversion efficiency in a stacked photovoltaic element including an intermediate layer, and to provide a method for manufacturing the stacked photovoltaic element. <P>SOLUTION: The method for manufacturing a stacked photovoltaic element includes a process for stacking a first photovoltaic element section including at least one photovoltaic element onto a substrate in a first embodiment, a process for stacking the intermediate layer that is made of an metal oxide and has a single film conductivity not less than 2×10<SP>-12</SP>S/cm and not more than 1×10<SP>-8</SP>S/cm onto the first photovoltaic element section, a process for exposing the intermediate layer to plasma including hydrogen, and a process for stacking a second photovoltaic element section including at least one photovoltaic element onto the intermediate layer that has been exposed to the plasma including hydrogen. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
