| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean stoker for surely and cleanly storing a storage object regardless of the type of the storage object in a compact stocker cabinet. SOLUTION: This clean stocker 10 having a storage part for storing a storage object 45 as a pre-working or post-working precise working material in a space closed so as to be substantially formed as a closed space with a positive pressure by adjusting an external introduction quantity from an outside air introduction part 13 is provided with: a blast means; a circulation air duct formed by air sent by the blast means; a storage part 21 arranged in the circulation air duct; and a contamination removal part including a dust removal filter and a chemical substance removal filter. A wind speed generated by the blast means 34 is configured to be the highest in a range in which the contamination removal efficiency of the chemical substance removal filter is high. COPYRIGHT: (C)2011,JPO&INPIT |
