| 摘要 |
PROBLEM TO BE SOLVED: To improve efficiency of using a working fluid in a fluid bearing. SOLUTION: A stage supporting device includes an expansion section that supports a stage, lengthens when the internal working fluid is pressurized, and shortens when the working fluid is decompressed; and a relaxing section that includes a magnetic force generation section connected to one end of the expansion section and a magnetic force operation section connected to the other end of the expansion section, also allows the magnetic force generation section and the magnetic force operation section to approach or separate, when one end approaches or separates from the other end, and the relaxation stiffness of a spring at the expansion section by a magnetic force that is generated by the magnetic force generation section and acts on the magnetic force operation section. In the stage support device, a change in the distance between the magnetic force generating section and the magnetic force operation section is smaller than the change in an interval between one end and the other end. COPYRIGHT: (C)2011,JPO&INPIT
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