THREE-DIMENSIONAL SHAPE DATA PROCESSING APPARATUS, THREE-DIMENSIONAL SHAPE DATA PROCESSING SYSTEM, AND THREE-DIMENSIONAL SHAPE MEASUREMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To improve a scheme for determining whether alignment in the arrangement of shape data is proper for a target. SOLUTION: The first shape data and the second-shape data expressing respective three-dimensional shapes of a first region and a second region having overlapping areas on the target are acquired; a plurality of third-shape data expressing a plurality of mutually different geometrical conditions are generated based on the second-shape data; and the respective third-shape data which have been generated are aligned in arrangement with the first-shape data, thereby generating a plurality of fourth-shape data. Whether the three-dimensional shape of the target can be reproduced with accuracy of a predetermined allowable range for a range containing the first region and the second region is determined, based on the correlation of the arrangement of the shape for the plurality of fourth-shape data. COPYRIGHT: (C)2011,JPO&INPIT