NANO-ELECTRO-MECHANICAL SWITCHES USING THREE-DIMENSIONAL SIDEWALL-CONDUCTIVE CARBON NANOFIBERS AND METHOD FOR MAKING THE SAME

摘要

The present disclosure describes a method for fabricating three-dimensional sidewall-conductive carbon nanofibers (CNFs) on selective substrates. In particular, fabrication of three-dimensional sidewall-conductive CNFs on niobium titanium nitride (NbTiN) layer is described. The present disclosure also describes a nano-electro-mechanical switch using one or more three-dimensional sidewall-conductive CNFs.