PATTERN GENERATION SYSTEMS AND HIGH BANDWIDTH FOCUS CONTROL SYSTEMS WITH SUPPRESSED REACTION FORCES AND NOISE

摘要

A pattern generation system includes an optical system and a rotor. The optical system is configured to project a laser image onto an optical scanner. The rotor has a plurality of optical arms arranged at a first angle relative to one another, and further includes the optical scanner. The laser image is sequentially reflected by the optical scanner into each of the plurality of optical arms of the rotor to generate a pattern on a workpiece.