HEATER USING 3C-SIC AND ITS FABRICATING METHOD

摘要

PURPOSE: A heater using 3C-SIC and a fabricating method thereof are provided to implement excellent durability by forming a heating unit with a 3C-SiC thin film. CONSTITUTION: In a heater using 3C-SIC and a fabricating method thereof, a support area(A) is divided into a first support region and a second support region. The support area is formed with a first 3C-SiC thin film. A cavity area(D) is formed in specific region on a substrate. A heating area(B) is formed on the first support region and is formed with a second 3C-SiC thin film.