| 摘要 |
PROBLEM TO BE SOLVED: To prevent a substrate from falling, by a simple means even if the substrate is released from suction pads while a conveying arm is moved in a substrate conveying arm for conveying the substrate while holding by the suction pads on the lower side and placing the substrate on a work stage which vacuum attracts and holds the substrate. SOLUTION: This substrate conveying arm 10 includes a plurality of suction pads 1, and conveys the substrate while vacuum attracting and holding the substrate on the lower side. A pair of falling prevention devices 20, 20 each of which comprises: an arm part attached so as to be rotated by a rotating shaft part; a catching part which is attached to the arm part and which projects to the lower side of the suction pads 1 positioned at the peripheral edge of the conveying arm; and a sliding part positioned at the front end of the arm part, are disposed adjacent to a part of the suction pads 1 positioned at the peripheral edge of the conveying arm among the plurality of suction pads 1. COPYRIGHT: (C)2011,JPO&INPIT
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