发明名称 |
PACKAGE, METHOD FOR MANUFACTURING THE SAME, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED TIMEPIECE |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a package capable of improving the degree of vacuum in a cavity, and to provide a method for manufacturing the same, a piezoelectric vibrator, an oscillator, an electronic apparatus and an atomic clock. <P>SOLUTION: In this package, a plurality of kinds of getter materials 20, 21 activated by being heated, and having activation temperatures for activation different from one another are arranged in the cavity C. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
申请公布号 |
JP2011049666(A) |
申请公布日期 |
2011.03.10 |
申请号 |
JP20090194476 |
申请日期 |
2009.08.25 |
申请人 |
SEIKO INSTRUMENTS INC |
发明人 |
ARATAKE KIYOSHI;SUGIYAMA TAKESHI;FUKUDA JUNYA |
分类号 |
H03H9/02;H01L23/02;H01L23/26;H03B5/32;H03H3/02 |
主分类号 |
H03H9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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