发明名称 PACKAGE, METHOD FOR MANUFACTURING THE SAME, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED TIMEPIECE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a package capable of improving the degree of vacuum in a cavity, and to provide a method for manufacturing the same, a piezoelectric vibrator, an oscillator, an electronic apparatus and an atomic clock. <P>SOLUTION: In this package, a plurality of kinds of getter materials 20, 21 activated by being heated, and having activation temperatures for activation different from one another are arranged in the cavity C. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011049666(A) 申请公布日期 2011.03.10
申请号 JP20090194476 申请日期 2009.08.25
申请人 SEIKO INSTRUMENTS INC 发明人 ARATAKE KIYOSHI;SUGIYAMA TAKESHI;FUKUDA JUNYA
分类号 H03H9/02;H01L23/02;H01L23/26;H03B5/32;H03H3/02 主分类号 H03H9/02
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