发明名称 PIEZOELECTRIC VIBRATOR, METHOD OF MANUFACTURING THE SAME, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIECE
摘要 <p><P>PROBLEM TO BE SOLVED: To suppress change of a frequency of a piezoelectric vibration piece and thereafter to perform gettering. <P>SOLUTION: A piezoelectric vibrator 1 includes: a package 9 including a base board 2 and a lid board 3 superposed and jointed on/to each other, and a cavity C formed between both the boards 2, 3; and a piezoelectric vibration piece 4 and a getter material 27 housed in the same cavity C; wherein a shielding wall 21 for shielding the piezoelectric vibration piece 4 and the getter material 27 from each other is arranged in the cavity C, and the shielding wall 21 is connected to both the base board 2 and the lid board 3. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011049665(A) 申请公布日期 2011.03.10
申请号 JP20090194475 申请日期 2009.08.25
申请人 SEIKO INSTRUMENTS INC 发明人 ONIZUKA OSAMU;SUGAMA KAZUYOSHI
分类号 H03H9/02;H01L23/02;H01L23/26;H03B5/32;H03H3/02 主分类号 H03H9/02
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