发明名称 FLEXURAL VIBRATION PIECE, FLEXURAL VIBRATOR, AND ELECTRONIC DEVICE
摘要 A flexural vibration piece includes a base, and a vibrating arms extending therefrom, each pair of vibrating arms has a first groove formed in the extension direction of the vibrating arm in one main surface following the direction in which the pair of vibrating arms are aligned, and a second groove formed side by side to the first groove in another main surface, the sum of the depths of the first and second groove portions is greater than the interval between the one main surface and the other main surface, and a mass portion is provided on each of the pair of vibrating arms, on the one main surface which is the opening side of the first grooves formed toward the outer sides opposite the inner sides on which the vibrating arms face each other.
申请公布号 US2011057549(A1) 申请公布日期 2011.03.10
申请号 US20100748714 申请日期 2010.03.29
申请人 SEIKO EPSON CORPORATION;EPSON TOYOCOM CORPORATION 发明人 KAWAI HIROKI;FURUHATA MAKOTO;YAMADA AKINORI;HAMAYAMA YUJI
分类号 H01L41/053;H01L41/04 主分类号 H01L41/053
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