METROLOGY PROBE AND METHOD OF CONFIGURING A METROLOGY PROBE
摘要
A metrology probe capable of measurements of a broad range of physical properties of individual samples of nano- or sub-nanometer dimensions is provided. The probe comprises a probe body, a substrate connected to the probe body, and a tip proximate the substrate. The probe further comprises a coarse piezoelectric actuator having an electrical input. The coarse piezo is configured to cause the tip and/or the substrate to move relative to each other when a first electrical signal is provided to the electrical input. The probe further comprises a low- pass filter in electrical communication with the electrical input of the coarse piezo. The probe further comprises a fine piezoelectric actuator having an electrical input configured to cause the tip and/or the substrate to move relative to each other when a second electrical signal is provided to the electrical input.
申请公布号
WO2010138904(A3)
申请公布日期
2011.03.10
申请号
WO2010US36714
申请日期
2010.05.28
申请人
THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK;CHOPRA, HARSH, DEEP;ARMSTRONG, JASON, N.;HUA, ZONGLU