COATING MATERIAL COMPOSITION FOR LIQUID IMMERSION EXPOSURE APPARATUS, LAMINATE, METHOD FOR FORMING LAMINATE, AND LIQUID IMMERSION EXPOSURE APPARATUS

摘要

Disclosed is a coating material composition for a liquid immersion exposure apparatus, which is used for the purpose of forming a liquid repellent layer on the surface of a component member of a liquid immersion exposure apparatus that performs a light exposure of a substrate by irradiating the substrate with an exposure beam through a liquid. The coating material composition for a liquid immersion exposure apparatus contains a fluorine-containing polymer which contains, in the main chain, a repeating unit that has a fluorine-containing aliphatic ring structure containing two or three ether oxygen atoms, which are not adjacent to each other, in the ring structure.