SUBSTRATE CASE MICROSCOPE CARRIER

摘要

A substrate case microscope carrier (100,100a) includes: a detection unit (100b), the detection unit (100b) including a photoelectric sensor (41), a sensor support (34), a sensor reflector plate (35), a sensor baffle plate (33), a suspension pin (32) and a control device; the sensor support (34) mounted on the second shoe plate (1a), the sensor reflector plate (35) mounted on the second shoe plate (1a), the photoelectric sensor (41) located lower of the sensor reflector plate (35) and electric connected with the control device, the second shoe plate (1a) having tank (39), the sensor baffle plate (33) having the first flexing part (33a) and the second flexing part (33b), which is extending in the reverse direction, the sensor baffle plate (33) tilt penetrating tank (39), the flexing point (33c) of the first flexing part (33a) carried on the suspension pin (32), the suspension pin (32) connected on the second shoe plate (1a), the first flexing part (33a) tilted upper and projected the upper end of the tank (39), the second flexing part (33b) tilted lower and projected the lower end (39), which is adjoining the photoelectric sensor (41) and forming light channel with the sensor reflector plate (35), the substrate case microscope carrier (100,100a) can prevent the substrate falling from the substrate case (5) in effect and increase the transfer efficiency and transfer quality of the substrate greatly.