发明名称 PLASMA LIGHT SOURCE SYSTEM
摘要 <p>Disclosed is a plasma light source system, which is provided with a plurality of plasma light sources (10) that periodically emit plasma light (8) from respective predetermined light emitting points (1a), and a light collecting device (40) which collects, to a single light collecting point (9), the plasma light emitted from the light emitting points of the plasma light sources.</p>
申请公布号 WO2011027699(A1) 申请公布日期 2011.03.10
申请号 WO2010JP64386 申请日期 2010.08.25
申请人 IHI CORPORATION;KUWABARA HAJIME 发明人 KUWABARA HAJIME
分类号 H01L21/027;G03F7/20;H05G2/00 主分类号 H01L21/027
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