| 摘要 |
<p>The particle beam processing device comprises a vacuum chamber (101) that has a chamber wall with a first opening that is formed in the chamber wall, a first cover that is adapted to cover the first opening and to rotate a first rotation axis that goes through the first opening, and to cover the second opening that is formed in the first opening, a second cover that is adapted to cover the second opening and to rotate a second rotation axis that goes through the second opening, and a pressure equalizing means that is adapted to reduce or balance a resultant power. The particle beam processing device comprises a vacuum chamber (101) that has a chamber wall with a first opening that is formed in the chamber wall, a first cover that is adapted to cover the first opening and to rotate a first rotation axis that goes through the first opening, and to cover the second opening that is formed in the first opening, a second cover that is adapted to cover the second opening and to rotate a second rotation axis that goes through the second opening, a pressure equalizing means that is adapted to reduce or balance a resultant power from a first pressure difference between a first pressure external of the vacuum chamber and a second pressure in the vacuum chamber that adjoins on the first and second cover, where the power causes on the first and/or the second layer, a third opening in the second cover with a seal that is adapted to close the third opening and to rotate a third rotation axis that goes through the third opening, a limiting means that is adapted to limit a rotation of the seal around the third rotation axis, a control device, a first drive device that is adapted to rotate the first cover controlled by the control device, a second drive device that is adapted to rotate the second cover controlled by the control device, and a rotatable and/or pivotable reception for a workpiece in the vacuum chamber that is adapted to rotate the workpiece controlled by the control device. The second cover is adapted to move a particle beam generator, which is arranged within the vacuum chamber. The first cover is adapted to rotate the first rotation axis over a first layer and/or the second cover is adapted to rotate the second rotation axis over a second layer. The pressure equalizing means comprises a pressure intensifier that has a fluid chamber and a piston that is movable in the fluid chamber in which the movable piston acts a first piston surface on which the first pressure difference between the first pressure and the second pressure acts, and a second piston surface on which the pressure acts in the fluid chamber. The first piston surface and the second piston surface are connected in a first ratio. The pressure equalizing means comprises a first cavity that immobilizes a first pressure reception surface on the first cover and/or a second cavity that immobilizes a second pressure reception surface on the second cover. The fluid chamber is fluidically connected with the first cavity and/or the second cavity. A second ratio of the surface of the first cover that is exposed to the first reception surface, to the first pressure reception surface, and/or a third ratio of the surface of the second cover that is exposed to the first pressure difference, to the second pressure reception surface are larger or equal to the first ratio. A tube is adapted in the seal to close the third opening. The tube has a section with a diameter reducing against its external diameter, where the diameter extends itself through an opening in an upper wall of the pressure chamber. The longitudinal hollow body is arranged in the pressure chamber. The tube has a flange at its external side and is adapted to lock the interior area of the pressure chamber, which has a connection for adjusting the pressure in the area that is mounted through the second cover, tube and the pressure chamber. The particle beam generator is adapted to a rotation-pivotable device in order to pivot a third rotation axis and fourth rotation axis that is vertical to the third rotation axis. The limiting device is adapted to limit the rotation of the seal around the third rotation axis around 360[deg] . The limiting means comprises a guiding member with a guide channel and a guide rod that is mounted at an end at the vacuum chamber.</p> |
