| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mass flow controller for solving various problems caused by an external output flow rate value in a fully closed state. <P>SOLUTION: The mass flow controller 100 includes: a flow rate measurement part 2 for measuring a flow rate of a fluid flowing inside a flow passage 1, and outputting a measurement flow rate value thereof; a control valve 3; a valve control part 42 controlling an opening of the control valve 3 based on a full-close command to forcibly fully close the control valve 3 or a flow rate value set as a target value; and an external output part 41 outputting the external output flow rate value based on the measurement flow rate value to the outside. In the mass flow controller 100, after the valve control part 42 receives zero as the full-close command or the set flow rate value, the external output part 41 outputs the external output flow rate value as zero, regardless of the measurement flow rate value. <P>COPYRIGHT: (C)2011,JPO&INPIT |
