摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic induction-type power generation element having an electret which is superior in thermal stability of the retained charge and is constituted of a film formed by patterning, and to provide a method of manufacturing the element. SOLUTION: The electrostatic induction-type power generation element includes a substrate 11, a pattern electrode 12 formed on the substrate 11, and the electret obtained by injecting the charge into a pattern film 13 which covers a pattern electrode 12 and is formed of a pattern corresponding to the pattern electrode 12. The pattern film 13 contains a polymer (A) having an aliphatic ring in a main chain or a material (A') derived from the polymer (A), and has a curved surface with a curvature radius of 0.5 to 15 μm continuously curved from the upper surface of the pattern film 13 to the side surface. COPYRIGHT: (C)2011,JPO&INPIT |