SUBSTRATE-SUPPORTING UNIT AND SUBSTRATE-PROCESSING APPARATUS COMPRISING SAME

摘要

According to the present invention, a substrate-supporting unit comprises: a mounting board on which a substrate is disposed; and a heater installed in the mounting board to heat the substrate disposed on the mounting board. The mounting board includes: a non-contact surface which faces a center portion of the substrate and which is spaced apart from the center portion of the substrate; and a contact member which extends outward from the non-contact surface, and which is arranged along an edge portion of the substrate disposed on the mounting board to support the edge portion of the substrate.