发明名称 METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A GROUP VIA ENVIRONMENT
摘要 Methods and devices for high-throughput printing of a precursor material for forming a film of a group IB-IIIA-chalcogenide compound are disclosed. In one embodiment, the method comprises forming a precursor layer on a substrate, the precursor is subsequently processed in a VIA environment.
申请公布号 US2011059231(A1) 申请公布日期 2011.03.10
申请号 US20100813505 申请日期 2010.06.11
申请人 发明人 BOLLMAN BRENT;LEIDHOLM CRAIG
分类号 B05D5/06;C23C16/06 主分类号 B05D5/06
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