| 摘要 |
PURPOSE: A semiconductor device is provided to maintain the desired contact resistance by defining the landing plug with the margin up to an end of the element isolation film. CONSTITUTION: A semiconductor device comprises a semiconductor substrate and a landing plug(110). The semiconductor substrate comprises an active area(104) defining as the element isolation film(102). The landing plug is formed on the semiconductor substrate and is formed on both ends of the active area. The landing plug formed on both ends is expanded to the active area.
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