| 摘要 |
PURPOSE: A process of producing a liquid discharge head substrate is provided to improve electrical property by precisely forming an insulating layer for insulating penetrating electrode and other members. CONSTITUTION: A process of producing a liquid discharge head substrate comprises A hollow unit(5) is formed on a second side which is the opposite side of a first side. An inner surface and floor side of the hollow unit are coated with an insulating layer. An electrode layer is partially exposed by removing a part of the insulation layer, covering the inner surface and floor side, by using a laser beam. The electrode is passed though the first side to the second side to be electrically contacted with the exposed part of the electrode layer.
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