| 摘要 |
PROBLEM TO BE SOLVED: To obtain a capacitive sensor wherein damage on a weight can be controlled, and to obtain a method of manufacturing a capacitive sensor wherein a process of forming a protrusion can be simplified. SOLUTION: In the capacitive sensor 1, including an insulating substrate 2 and a silicon substrate 4 bonded to the insulating substrate 2 wherein a weight 5 and a support 16 for supporting the weight 5 via a spring 6 are formed on the silicon substrate 4 and a gap 7 is formed between the weight 5 and the insulating substrate 2, a pyramid-like protrusion 12, having a tapered leading end and facing the insulating substrate 2, is provided at least at the periphery of the surface 5a of the weight 5 facing the insulating substrate 2. COPYRIGHT: (C)2011,JPO&INPIT
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