发明名称 Apparatus for Extracting Gaseous Specimens to be Measured from a Production Process and System
摘要 An apparatus and a system for extracting gaseous specimens to be measured, preferably during the production of polycrystalline silicon, are disclosed. The apparatus according to the invention is a flange-like device (80), which is placed between each of the at least two pipe sections (11a, 11b, 21a, 21b, 41a, 41b) of the outlet pipes (11, 21, 41).
申请公布号 US2011058987(A1) 申请公布日期 2011.03.10
申请号 US20090581585 申请日期 2009.10.19
申请人 G+R POLYSILICON GMBH 发明人 STOECKLINGER ROBERT
分类号 G01N1/22;G01N30/00 主分类号 G01N1/22
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