发明名称 NONVOLATILE MEMORY DEVICE AND FABRICATION METHOD
摘要 Provided is a nonvolatile memory device and a fabrication method. The nonvolatile memory device includes an active region defined in a semiconductor substrate, a gate insulating layer formed on the active region and a plurality of gate patterns formed on the gate insulating layer, and crossing over the active region. The gate insulating layer includes a discharge region in a predetermined portion between the gate patterns, the discharge region having a lesser thickness than that of the gate insulating layer under the gate pattern, because a thickness portion of the gate insulating layer is removed to form the discharge region.
申请公布号 US2011059585(A1) 申请公布日期 2011.03.10
申请号 US20100943366 申请日期 2010.11.10
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE WOON-KYUNG;CHOI JEONG-HYUK
分类号 H01L21/336 主分类号 H01L21/336
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