| 摘要 |
A piezoelectric/electrostrictive film-type actuator has a ceramic base (44) and a piezoelectric/electrostrictive element (78), which has piezoelectric/electrostrictive films (79) and electrode films (73,75,77) and which is disposed on the ceramic base, and is driven in accordance with a displacement of the piezoelectric/electrostrictive element. The piezoelectric/ electrostrictive element is formed such that the piezoelectric/electrostrictive films and the electrode films are alternately laminated so as to construct the uppermost layer and the lowermost layer with the electrode films. Also, the piezoelectric/electrostrictive films have two layers and no pores, containing a different phase formed by a decomposed material thereof, in the boundary sandwiched therebetween. In addition, the upper layer of the two-layered piezoelectric/electrostrictive films is thicker than the lower layer. This piezoelectric/electrostrictive film-type actuator solves the problem in that a withstand voltage of the piezoelectric/electrostrictive films is likely to decrease, and effectively achieves a bending displacement. |
