SEMICONDUCTOR SURFACE PREPARATION ULTRAVIOLET INVESTIGATION SYSTEM

摘要

PURPOSE: An ultraviolet irradiating device for processing a semiconductor surface is provided to suppress interference of rays emitted from an ultraviolet lamp, thereby increasing reflectivity of rays emitted from the ultraviolet lamp. CONSTITUTION: Both ends and the bottom of a housing(110) are opened. A separating space unit is formed on one end of a heat emitting member(130). An ultraviolet lamp(150) irradiates an ultraviolet ray on a semiconductor surface. A reflecting plate(160) has a bent section corresponding to the front side of the heat emitting member. A fixing bracket(170) is fixed to the heat emitting member.