| 摘要 |
PURPOSE: A method for preparing a sample for an FIB-TEM(Focused Ion Beam-Transmission Electron Microscope) is provided to prevent damage to a surface being observed, caused by deposition of a protective layer. CONSTITUTION: A method for preparing a sample for an FIB-TEM is as follows. Small pieces(110) including a part being observed are separated from a wafer(100) by applying an impact on the surface of the wafer. The rear sides of the small pieces is faced upward and protective layers are deposited on them. A sample is made from the small pieces deposited with the protective layers.
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