| 摘要 |
PURPOSE: A slit nozzle cleaner and a floating type substrate coater are provided to prevent the contamination of a tray and a fixing prevention liquid supply unit by including a buffering unit. CONSTITUTION: A cleaner cleans a slit nozzle which supplies the chemical to a substrate. A tray(150) receives foreign materials separated from a slit nozzle by the cleaner. A fixing prevention liquid supply unit(160) supplies fixing prevention liquid to prevent foreign materials from being fixed to the inner wall of the tray. A buffering unit(170) buffers the collision between the inner wall of the tray and the fixing prevention liquid sprayed from the fixing prevention liquid supply unit.
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