| 摘要 |
PURPOSE: A method and an apparatus for etching a substrate with a sheet vibration are provided to improve the thickness uniformity of a glass substrate by efficiently removing sludge through the forcible vibration of a sheet. CONSTITUTION: A process bath(3-10) receives chemical. An inlet(3-20) passes through a pipe and inputs the chemical to the process bath. An outlet(3-30) passes through a pipe and discharges the chemical to the outside of the process bath. A sheet(3-60) forms the forcible flow of the chemical. A sheet fixing frame(3-70) vibrates the sheet with external power.
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